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Surface micromachining builds microstructures by deposition and etching structural layers over a substrate. This is different from Bulk micromachining
Surface_micromachining
Topics referred to by the same term
aspect ratio (HAR) silicon micromachining This disambiguation page lists articles associated with the title Micromachining. If an internal link incorrectly
Micromachining
Type of excimer laser
in the production of semiconductor integrated circuits, eye surgery, micromachining, and scientific research. "Excimer" is short for "excited dimer", while
Argon_fluoride_laser
Process used to produce micromachinery or microelectromechanical systems
substrate, bulk micromachining produces structures inside a substrate. Usually, silicon wafers are used as substrates for bulk micromachining, as they can
Bulk_micromachining
Threshold of force
An example is the Chapman strut, a suspension linkage. During surface micromachining, stiction or adhesion between the substrate (usually silicon-based)
Stiction
Electronics component
due to change in capacitance. CMUTs are constructed on silicon using micromachining techniques. A cavity is formed in a silicon substrate, and a thin layer
Capacitive micromachined ultrasonic transducer
Capacitive_micromachined_ultrasonic_transducer
Very small devices that incorporate moving components
rather than using the substrate itself. Surface micromachining was created in the late 1980s to render micromachining of silicon more compatible with planar
MEMS
Mirror-based electronic display technology
mirrors and supporting mechanical structures are constructed using surface micromachining. The mirrors can be individually rotated ±10–12°, to an on or off
Digital_micromirror_device
Linear motor often used in microtechnology
nanometer scale and are generally manufactured by bulk micromachining or surface micromachining a silicon wafer substrate. The attractive electrostatic
Comb_drive
Type of semiconductor laser diode
vertical-cavity surface-emitting laser (VCSEL /ˈvɪksəl/) is a type of semiconductor laser diode with laser beam emission perpendicular from the top surface, contrary
Vertical-cavity surface-emitting laser
Vertical-cavity_surface-emitting_laser
Mechanical objects that are very small
devices is usually done by two techniques, surface micromachining and bulk micromachining. To do bulk micromachining, the region needed is highly doped with
Micromachinery
processing temperature. An RF MEMS fabrication process is based on surface micromachining techniques, and allows for integration of SiCr or TaN thin film
Radio-frequency microelectromechanical system
Radio-frequency_microelectromechanical_system
Electronic oscillator
MEMS (Micro-Electro-Mechanical-System) resonators fabricated by surface micromachining have enabled ultra-low power stable pierce oscillators. The tiny
Pierce_oscillator
Stresses which remain in a solid material after the original cause is removed
January 2016). "A wafer mapping technique for residual stress in surface micromachined films". Journal of Micromechanics and Microengineering. 26 (9) 095013
Residual_stress
American microelectromechanical researcher
1982. This led to a class of micromanufacturing processes called surface micromachining. These processes preceded the creation of low cost, mass-produced
Richard_S._Muller
Device consisting of piezoelectric material
film depends on the piezomaterial selected and many other items like the surface on which the film is grown and various manufacturing - thin film growth
Thin-film bulk acoustic resonator
Thin-film_bulk_acoustic_resonator
Nanometer-scale mechanical switch
Those switches were made using bulk micromachining processes and electroplating. In the 1980s, surface micromachining techniques were developed and the
Nanoelectromechanical_relay
Microelectromechanical system that uses piezoelectricity to generate motion
piezoceramics are subjected to direct bulk micromachining and then electrodes. The integrative approach: Micromachined structures are integrated in silicon
Piezoelectric microelectromechanical systems
Piezoelectric_microelectromechanical_systems
Sound transmission method
device with a vertical membrane architecture using polysilicon surface micromachining on a silicon substrate. This device is composed of multiple acoustic
Sound_from_ultrasound
Novel type of computer memory
cantilevers are made entirely out of silicon, using surface micromachining at the wafer surface. Regarding the creation of indentations, or pits, non-crosslinked
Millipede_memory
Small-scale magnetometer
Emmerich, H.; Schöfthaler, M. Magnetic field measurements with a novel surface micromachined magnetic-field sensor. IEEE Tans. Electron Dev. 2000, 47, 972-977
MEMS_magnetic_field_sensor
Mirror whose surface can be deformed
thousand actuators. MEMS concept mirrors are fabricated using bulk and surface micromachining technologies. They consist of a thin reflective membrane controlled
Deformable_mirror
Dutch magnetic tape storage company
metal surface micromachining: A new enabling foundry technology". In Yasaitis, John A; Perez-Maher, Mary Ann; Karam, Jean Michel (eds.). Micromachining and
OnStream
of Electrical Engineering/Microsystems Engineering, specifically surface-micromachined actuators in microoptical applications and silicon-on-insulator
Ha_Duong_Ngo
photolithography, anisotropic etching, surface micromachining and bulk micromachining of silicon. Silicon micromachining has numerous advantages that facilitate
Micropump
Ionized gas-generating "pinch" machine
X-ray source for next-generation microelectronics lithography, surface micromachining, pulsed X-ray and neutron source for medical diagnosis and therapy
Dense_plasma_focus
American electrical engineer
advisor, Richard S. Muller at Berkeley, developed polysilicon surface micromachining technology. This process opened the possibilities of micro mechanical
Roger_T._Howe
Overview of and topical guide to nanotechnology
Nanocircuits – Nanocomputer – Nanoelectromechanical systems (NEMS) Surface micromachining – Nanoelectromechanical relays Molecular electronics – Nanolithography
Outline_of_nanotechnology
Device that measures proper acceleration
accelerometers Shear mode accelerometer Strain gauge Surface acoustic wave (SAW) Surface micromachined capacitive (MEMS) Thermal (submicrometre CMOS process)
Accelerometer
and analytical systems. Conventional micromachining techniques, such as surface micromachining, bulk micromachining, and LIGA, have limited capability to
3D_microfabrication
Nanotechnology
channels. Other technologies to fabricate nano-channels include surface micromachining with sacrificial layers, nano-imprinting lithography, and soft-lithography
Nanofluidic_circuitry
Flaw which compromises a weld's structural integrity
(2016-01-01). "A wafer mapping technique for residual stress in surface micromachined films". Journal of Micromechanics and Microengineering. 26 (9) 095013
Welding_defect
Dynamics of fluids confined in nanoscale structures
PCTE) and synthetic vesicles. Standard photolithography, bulk or surface micromachining, replication techniques (embossing, printing, casting and injection
Nanofluidics
Model of phonons-polaritons
predominantly in the direction of the crystal optic axis. Femtosecond laser micromachining is used for device fabrication by milling 'air' holes and/or troughs
Polaritonics
Type of ultraviolet laser important in chip manufacturing and eye surgery
semiconductor based integrated circuits or "chips", eye surgery, and micromachining. Since the 1990s, excimer lasers have been widely used in high-resolution
Excimer_laser
Industrial process
Eventually the atoms of the shot element embed themselves at or just below the surface of the target, thus modifying the physical properties of the target. A
Plasma_etching
maint: multiple names: authors list (link) Li, M-H.; et al. (2001). "Surface micromachined polyimide scanning thermocouple probes". Journal of Microelectromechanical
Scanning_thermal_microscopy
Transition of a liquid to vapor
Müller, Lumera Laser. "Picosecond Lasers for High-Quality Industrial Micromachining". Archived from the original on 2018-02-20. Retrieved 2018-02-19.{{cite
Vaporization
Rotating circular machine part with teeth that mesh with another toothed part
different functions and applications. Diameters may range from a few μm in micromachines, to a few mm in watches and toys to over 10 metres in some mining equipment
Gear
technology-focused company, with diverse markets, including science and micromachining. Inventors employed by Lightwave Electronics received 51 US patents
Lightwave Electronics Corporation
Lightwave_Electronics_Corporation
Using bacteria to remove materials
bacteria, will have material removed from its surface over time. Biomachining is ideal for micromachining due to its very low material removal rate. In
Biomachining
Board to support and connect electronic components
pattern of traces, planes and other features (similar to wires on a flat surface) etched from one or more sheet layers of copper laminated onto or between
Printed_circuit_board
Speed at which an electrochemical impulse propagates down a neural pathway
offer the following: Electrodes are about 1/10 the size of standard wet surface electrodes Arrays of electrodes can be created and scaled to cover areas
Nerve_conduction_velocity
Solution used in microfabrication
ISBN 978-0-9616721-3-3. Williams, K.R.; Muller, R.S. (Dec 1996). "Etch rates for micromachining processing". Journal of Microelectromechanical Systems. 5 (4): 256–269
Buffered_oxide_etch
distinct geometries that utilize principles of localized surface plasmon resonance and the high surface area property of nanoparticles to give rise to distinct
Nanoantennas
Wafer bonding technique
can be organic or inorganic and is deposited on one or both substrate surfaces. Adhesives, especially SU-8, benzocyclobutene (BCB) and Parylene are specialized
Adhesive bonding of semiconductor wafers
Adhesive_bonding_of_semiconductor_wafers
Filtration technique
because the majority of the feed flow travels tangentially across the surface of the filter, rather than into the filter. The principal advantage of
Cross-flow_filtration
Anti-stall control surface on aircraft
leading-edge extension (LEX) is a small extension to an aircraft wing surface, forward of the leading edge. The primary reason for adding an extension
Leading-edge_extension
Form of gas laser
Klank, Henning; Kutter, Jörg P.; Geschke, Oliver (2002). "CO2-laser micromachining and back-end processing for rapid production of PMMA-based microfluidic
Carbon-dioxide_laser
multi-actuator mechanisms for high-precision positioning. Driven by advances in micromachining and microfabrication, designs shifted in the 1990s toward electrostatic
Inchworm_motor
Device
C.A. Volkert; A.M. Minor (2007). "Focused Ion Beam: Microscopy and Micromachining" (PDF). MRS Bulletin. 32 (5): 389–399. doi:10.1557/mrs2007.62. "Carl
Focused_ion_beam
(link) Klotzbach, U; Lasagni, A, F; Panzner, M; Volker, F (2011). "Laser Micromachining". Fabrication and Characterization in the Micro-Nano Range. Advanced
Surface plasmon resonance microscopy
Surface_plasmon_resonance_microscopy
Computer memory type used for data preservation
The "5-dimensional" descriptor is because, unlike marking only on the surface of a 2D piece of paper or magnetic tape, this method of encoding uses two
5D_optical_data_storage
Quantitative phase microscope
Fringe 2005. 59 (9): 667–671. Andrew Holmes; James Pedder (2006). "Laser micromachining in 3D and large area applications". The Industrial Laser User. 45: 27–29
Digital holographic microscopy
Digital_holographic_microscopy
Hexagonal lattice made of carbon atoms
Si(100) surface and graphene changes the electronic states of graphene significantly. This effect results from the covalent bonding between C and surface Si
Graphene
American physicist, author and professor (born 1942)
sources, focused ion and electron beams and their applications for micromachining, surface analysis and microscopy and instrumentation development for semiconductor
Jon_Orloff
Process for shaping conductive metals
turbine blades Multiple hole drilling Machining steam turbine blades Micromachining Profiling and contouring Rifling No contact occurs between tool and
Electrochemical_machining
Multidisciplinary field of engineering
the miniaturisation of mechanical systems, with the development of micromachining technology based on silicon semiconductor devices, as engineers began
Electromechanics
Engraving objects using lasers
does not involve the use of inks or tool bits that contact the engraving surface and wear out, giving it an advantage over alternative marking technologies
Laser_engraving
Form of soft lithography
different applications Microcontact printing has great applications in micromachining. For this application inking solutions commonly consist of a solution
Microcontact_printing
Fabrication at micrometre scales and smaller
wafers even though glass, plastics and many other substrate are in use. Micromachining, semiconductor processing, microelectronic fabrication, semiconductor
Microfabrication
Oxidizing acid mixture containing sulfuric acid and hydrogen peroxide
will decompose most organic matter, and it will also hydroxylate most surfaces (by adding –OH groups), making them highly hydrophilic (water-compatible)
Piranha_solution
Controlled material removal, without the use of liquid substances
vertical sides are desired. Along with semiconductor manufacturing, micromachining and display production, the removal of organic residues by oxygen plasmas
Dry_etching
Chemical compound
groups, such as the surfaces of glass, ceramics, or silica. Due to its heavily fluorinated tail group, a FDTS monolayer reduces surface energy. Deposition
Perfluorodecyltrichlorosilane
Compound of silicon and nitrogen
electrically isolate different structures or as an etch mask in bulk micromachining. As a passivation layer for microchips, it is superior to silicon dioxide
Silicon_nitride
Tiny device in which chemical reactions take place
Versuchstechnik, HVT) of Forschungszentrum Karlsruhe in Germany, using mechanical micromachining techniques that were a spinoff from the manufacture of separation nozzles
Microreactor
Probe which tests for biological molecules
high refractive index glass surface can absorb laser light, producing electron waves (surface plasmons) on the gold surface. This occurs only at a specific
Biosensor
Genus of single-celled organisms
and tadpoles. Vorticella has been found as an epibiont (attached to the surface of a living substratum when in its sessile stage) of crustaceans, the basibiont
Vorticella
Small form factor atomic clock
in a tiny 2-millimetre (0.079 in) capsule, fabricated using silicon micromachining techniques, is heated to vaporize the alkali metal. A semiconductor
Chip-scale_atomic_clock
Class of devices for nanoscale functionality
many NEMS. NEMS frequently utilize silicon due to well-characterized micromachining techniques; however, its intrinsic stiffness often hinders the capability
Nanoelectromechanical_systems
Tunisian-American-French chemist (born 1961)
Meeting on March 23, 2010, Bawendi received the ACS Award in Colloid and Surface Chemistry. He also received the 2011 SEMI Award for North America for quantum
Moungi_Bawendi
Chemical compound
interact with surfaces based on sulfur-metal interaction (alkylthiolates) or a sol-gel type reaction with a hydroxylated oxide surface (trichlorosilyl
Parylene
Lithographic technique that uses a scanning beam of electrons
lithography". Microlithography. SPIE Handbook of Microlithography, Micromachining and Microfabrication. Vol. 1. Archived from the original on 2019-08-19
Electron-beam_lithography
Injection of EM radiation into a solid, resulting in bond breakage
D. (November 2009). "Picosecond Lasers for High-Quality Industrial Micromachining". Photonics Spectra: 46–47. Mason, Philip E.; Uhlig, Frank; Vaněk, Václav;
Coulomb_explosion
Union of biological and artificial materials
are efficient. This means having precise control over adhesion at the surface, diffusion of nutrients, and signal conduction. Actuation mechanisms within
Biohybrid_system
Device to detect the presence or absence of gases
Metal-Oxide-Semiconductor Sensor and Micro-Packed Gas Chromatographic Column". Micromachines. 9 (8): 408. doi:10.3390/mi9080408. ISSN 2072-666X. PMC 6187308. PMID 30424341
Gas_detector
Emerging technology field
macroscopic material. The surface anchored motors could potentially be used to move and position nanoscale materials on a surface in the manner of a conveyor
Nanorobotics
Low-pressure voids formed in liquids
voids that implode near to a hard surface cause cyclic stress through repeated implosion. This results in surface fatigue of the material, causing a
Cavitation
Polish science fiction author and futurologist (1921–2006)
Other examples include the intelligent swarms of mechanical insect-like micromachines in The Invincible, and strangely ordered societies of more human-like
Stanisław_Lem
(2007-01-25). "Isotropic etching of silicon in fluorine gas for MEMS micromachining". Journal of Micromechanics and Microengineering. 17 (2): 384–392. Bibcode:2007JMiMi
Vapor_etching
Medical intervention
transducer. Most ultrasound examination is done using a transducer on the surface of the body, but improved visualization is often possible if a transducer
Medical_ultrasound
Visual prosthesis
implants by placement. Epiretinal implants are placed in the internal surface of the retina, while subretinal implants are placed between the outer retinal
Retinal_implant
2673-8244 Micro 2021 2673-8023 Microbiology Research 2010 2036-7481 Micromachines 2010 2072-666X Microorganisms 2013 2076-2607 Microplastics 2022 2673-8929
List of MDPI academic journals
List_of_MDPI_academic_journals
on the material size. What differentiates these particles from normal surface plasmons is that plasmonic nanoparticles also exhibit interesting scattering
Plasmonic_nanoparticle
Brand of glass
publishing formats and disciplines. Many of those deal with topics such as Micromachining Foturan 3D / laser direct writing in Foturan Using Foturan for optical
Foturan
Dutch-born American physicist
temperatures and material changes at the focus. This femtosecond laser micromachining technique is now widely used for data storage, fabrication of integrated
Eric_Mazur
Process of creating thru-holes using laser cutting methods
Yao, Y.L.; Chen, K. (2001-09-01). "Modelling and Analysis of UV Laser Micromachining of Copper". The International Journal of Advanced Manufacturing Technology
Laser_drilling
Way to produce very short laser bursts
of materials. An example of pico- and femtosecond micromachining is drilling the silicon jet surface of inkjet printers. Two-photon microscopy. Corneal
Mode_locking
Technology with features near one micrometre
Microtechnology. Wikibooks has a book on the topic of: Microtechnology Institute for Micromachine and Microfabrication Research at Simon Fraser University
Microtechnology
Chemical compound
E.; Kruglick, E.; Pister, K.; Hecht, M. (1995). "Gas-phase silicon micromachining with xenon difluoride". In Bailey, Wayne; Motamedi, M. Edward; Luo,
Xenon_difluoride
US-based biomedical engineer
Kurt; Fan, Zhonghui; Effenhauser, Carlo S.; Manz, Andreas (1993). "Micromachining a Miniaturized Capillary Electrophoresis-Based Chemical Analysis System
Z._Hugh_Fan
Molecular-scale artificial or biological device
; Lim, N.; Kang, D. Y.; Zimmerman, M.; Zhang, L.; Wang, J. (2011). "Micromachine-Enabled Capture and Isolation of Cancer Cells in Complex Media". Angewandte
Molecular_machine
Nitride of aluminum
bulk and surface properties that depend sensitively on the chosen polarity. Metal-polar (Al-polar) AlN refers to films grown with the surface terminated
Aluminium_nitride
Converter that measures a physical quantity and converts it into a signal
Metal-Oxide-Semiconductor Sensor and Micro-Packed Gas Chromatographic Column". Micromachines. 9 (8): 408. doi:10.3390/mi9080408. ISSN 2072-666X. PMC 6187308. PMID 30424341
Sensor
Concept in fluid dynamics
first contends that the surface roughness is responsible for bringing the fluid to rest through viscous dissipation past the surface irregularities. The second
No-slip_condition
Process of separating populations of cells
cell-sorting yields very high specificity according to one or several surface markers, but one limitation is constituted by the number of cells that
Cell_sorting
Additive process used to make a 3D object
metal material device to form a removable metal fabrication on a reusable surface for immediate use or salvaged for printing again by remelting. This appears
3D_printing
Solar cell that can produce electrical energy from each side of the cell
suns (1 sun = 1000W/m2), is measured independently for the front and rear surfaces for bifacial solar cells. BSCs and modules (arrays of BSCs) were invented
Bifacial_solar_cells
Accumulation and adhesion of molecules to a surface without penetration
will have more exposed surface area for proteins to interact with. In terms of biomedical engineering applications, micromachining techniques are often
Protein_adsorption
minimize its contact with the surface. Differences in surface hydrophobicity affect a liquid's ability to spread and 'wet' a surface by changing the contact
Digital_microfluidics
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SURFACE MICROMACHINING
SURFACE MICROMACHINING
Boy/Male
Irish American English
Surname.
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Irish American Welsh
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Indian
Part of Sun
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Indian, Sanskrit
Surface of the Earth
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Surname or Lastname
English (Cumbria and Durham)
English (Cumbria and Durham) : variant spelling of Furness.
Boy/Male
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Surname.
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Irish Gaelic
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Scottish American English
Surname.
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Surname.
Surname or Lastname
Probably an Americanized spelling of the Swiss German surname Bunz (see Bunce).English
Probably an Americanized spelling of the Swiss German surname Bunz (see Bunce).English : possibly a variant of Bunt.
Boy/Male
Irish American Biblical Hebrew
Surname.
SURFACE MICROMACHINING
SURFACE MICROMACHINING
SURFACE MICROMACHINING
SURFACE MICROMACHINING
SURFACE MICROMACHINING
SURFACE MICROMACHINING
SURFACE MICROMACHINING
n.
That part of the side which is terminated by the flank prolonged, and the angle of the nearest bastion.
n.
A form of machine for dressing the surface of wood, metal, stone, etc.
v. t.
To give a surface to; especially, to cause to have a smooth or plain surface; to make smooth or plain.
n.
Alt. of Serfdom
p. pr. & vb. n.
of Surface
n.
An inclosed place in which heat is produced by the combustion of fuel, as for reducing ores or melting metals, for warming a house, for baking pottery, etc.; as, an iron furnace; a hot-air furnace; a glass furnace; a boiler furnace, etc.
n.
An instrument for gauging or testing a plane surface. See Surface gauge, under Surface.
n.
To throw out, or exhale, as from a furnace; also, to put into a furnace.
n.
The exterior part of anything that has length and breadth; one of the limits that bound a solid, esp. the upper face; superficies; the outside; as, the surface of the earth; the surface of a diamond; the surface of the body.
a.
meeting a curve or surface at a point and having at that point the same direction as the curve or surface; -- said of a straight line, curve, or surface; as, a line tangent to a curve; a curve tangent to a surface; tangent surfaces.
n.
Surface; body; substance.
v. t.
To work over the surface or soil of, as ground, in hunting for gold.
n.
A magnitude that has length and breadth without thickness; superficies; as, a plane surface; a spherical surface.
n.
Surface; superficies; externality.
a.
Having the surface smooth and polished; -- said of leaves, the surfaces of shells, etc.
imp. & p. p.
of Surface
n.
Hence, outward or external appearance.
v. t.
To name or call by an appellation added to the original name; to give a surname to.
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