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Topics referred to by the same term
systems Bulk micromachining Surface micromachining High-aspect-ratio microstructure technologies High aspect ratio (HAR) silicon micromachining This disambiguation
Micromachining
Very small devices that incorporate moving components
bulk micromachining with comb structures and in-plane operation typical of surface micromachining. While it is common in surface micromachining to have
MEMS
Surface micromachining builds microstructures by deposition and etching structural layers over a substrate. This is different from Bulk micromachining, in
Surface_micromachining
Process used to produce micromachinery or microelectromechanical systems
Bulk micromachining is a process used to produce micromachinery or microelectromechanical systems (MEMS). Unlike surface micromachining, which uses a succession
Bulk_micromachining
Threshold of force
example is the Chapman strut, a suspension linkage. During surface micromachining, stiction or adhesion between the substrate (usually silicon-based)
Stiction
Mechanical objects that are very small
is usually done by two techniques, surface micromachining and bulk micromachining. To do bulk micromachining, the region needed is highly doped with boron
Micromachinery
Electronics component
due to change in capacitance. CMUTs are constructed on silicon using micromachining techniques. A cavity is formed in a silicon substrate, and a thin layer
Capacitive micromachined ultrasonic transducer
Capacitive_micromachined_ultrasonic_transducer
Type of excimer laser
in the production of semiconductor integrated circuits, eye surgery, micromachining, and scientific research. "Excimer" is short for "excited dimer", while
Argon_fluoride_laser
Type of ultraviolet laser important in chip manufacturing and eye surgery
semiconductor based integrated circuits or "chips", eye surgery, and micromachining. Since the 1990s, excimer lasers have been widely used in high-resolution
Excimer_laser
MEMS-based piezoelectric ultrasonic transducers
Piezoelectric micromachined ultrasonic transducers (PMUT) are MEMS-based piezoelectric ultrasonic transducers. Unlike bulk piezoelectric transducers which
Piezoelectric micromachined ultrasonic transducer
Piezoelectric_micromachined_ultrasonic_transducer
Boston Micromachines Corporation is a US company operating out of Cambridge, Massachusetts. Boston Micromachines manufactures and develops instruments
Boston Micromachines Corporation
Boston_Micromachines_Corporation
Device consisting of piezoelectric material
Review". Micromachines. 15 (1471): 1471. doi:10.3390/mi15121471. PMC 11677952. PMID 39770224. Ruby, R.; Merchant, P. (1994). "Micromachined thin film
Thin-film bulk acoustic resonator
Thin-film_bulk_acoustic_resonator
German industrial metal band
Sub Dub Micromachine (also abbreviated as SDMM) is a German metal band. They gained fame through heavy airplay on the internet radio station ChroniX Aggression
Sub_Dub_Micromachine
Model of phonons-polaritons
predominantly in the direction of the crystal optic axis. Femtosecond laser micromachining is used for device fabrication by milling 'air' holes and/or troughs
Polaritonics
Device that measures proper acceleration
unmanned aerial vehicles, accelerometers help to stabilize flight. Micromachined micro-electromechanical systems (MEMS) accelerometers are used in handheld
Accelerometer
technology-focused company, with diverse markets, including science and micromachining. Inventors employed by Lightwave Electronics received 51 US patents
Lightwave Electronics Corporation
Lightwave_Electronics_Corporation
American businessman (born 1948)
NovaSensor, a company which develops low-cost micromachined blood pressure sensors using bulk silicon micromachining technology, in 1985. In 1996, he co-founded
Kurt_Petersen_(inventor)
These devices are usually fabricated using micro-optics and standard micromachining technologies using materials like silicon, silicon dioxide, silicon
Microoptoelectromechanical systems
Microoptoelectromechanical_systems
Speed at which an electrochemical impulse propagates down a neural pathway
Swaminathan; Bragg, Julian A.; Ross, James D.; Allen, Mark G. (30 June 2011). "Micromachined three-dimensional electrode arrays for transcutaneous nerve tracking"
Nerve_conduction_velocity
Linear motor often used in microtechnology
nanometer scale and are generally manufactured by bulk micromachining or surface micromachining a silicon wafer substrate. The attractive electrostatic
Comb_drive
Multidisciplinary field of engineering
the miniaturisation of mechanical systems, with the development of micromachining technology based on silicon semiconductor devices, as engineers began
Electromechanics
Tiny device in which chemical reactions take place
Versuchstechnik, HVT) of Forschungszentrum Karlsruhe in Germany, using mechanical micromachining techniques that were a spinoff from the manufacture of separation nozzles
Microreactor
Board to support and connect electronic components
Dies and Electrical Components from Rigid to Flexible Substrates". Micromachines. 14 (2): 415. doi:10.3390/mi14020415. ISSN 2072-666X. PMC 9960505. PMID 36838115
Printed_circuit_board
American scientist and engineer
Known for molecular beam epitaxy (MBE), nanofabrication technologies, micromachining, high speed electronic devices, optoelectronics devices, quantum transport
James_S._Harris
Rotating circular machine part with teeth that mesh with another toothed part
different functions and applications. Diameters may range from a few μm in micromachines, to a few mm in watches and toys to over 10 metres in some mining equipment
Gear
the wire radius and d is the wire spacing. A Bradbury-Nielsen Gate micromachined from a silicon on insulator wafer has been reported. Norris E. Bradbury
Bradbury–Nielsen_shutter
Canadian physicist, engineer, and Nobel laureate
in the microcrystalline lens of the human eye, during the process of micromachining of the eye lens to cure presbyopia. Strickland became a fellow of Optica
Donna_Strickland
Polish science fiction author and futurologist (1921–2006)
Other examples include the intelligent swarms of mechanical insect-like micromachines in The Invincible, and strangely ordered societies of more human-like
Stanisław_Lem
Dutch magnetic tape storage company
surface micromachining: A new enabling foundry technology". In Yasaitis, John A; Perez-Maher, Mary Ann; Karam, Jean Michel (eds.). Micromachining and Microfabrication
OnStream
Transition of a liquid to vapor
Müller, Lumera Laser. "Picosecond Lasers for High-Quality Industrial Micromachining". Archived from the original on 2018-02-20. Retrieved 2018-02-19.{{cite
Vaporization
Form of soft lithography
different applications Microcontact printing has great applications in micromachining. For this application inking solutions commonly consist of a solution
Microcontact_printing
microcantilevers is a technique that overcomes the limitations of the typical micromachined cantilever beam where there are two axes of directions available rather
Cell_biomechanics
American MEMS inertial sensor manufacturer
ROHM Co., Ltd. of Japan. Kionix developed high-aspect-ratio silicon micromachining based on research originally conducted at Cornell University. The company
Kionix
Scientific organization
power and energy, electronics, information and systems, sensors and micromachines and other. Institute of Electrical and Electronics Engineers in the
Institute of Electrical Engineers of Japan
Institute_of_Electrical_Engineers_of_Japan
Hexagonal lattice made of carbon atoms
(2022). "Applications of Graphene-Based Materials in Sensors: A Review". Micromachines. 13 (2): 184. doi:10.3390/mi13020184. PMC 8880160. PMID 35208308. Li
Graphene
Mirror-based electronic display technology
and supporting mechanical structures are constructed using surface micromachining. The mirrors can be individually rotated ±10–12°, to an on or off state
Digital_micromirror_device
American physicist, author and professor (born 1942)
sources, focused ion and electron beams and their applications for micromachining, surface analysis and microscopy and instrumentation development for
Jon_Orloff
Lebanese-American electrical and computer engineer
University of California, San Diego. He is the first to introduce MEMS and micromachining to the RF/microwave field by developing several novel components with
Gabriel_M._Rebeiz
2002 anime television series
reveals to Major Motoko Kusanagi that he had discovered that several micromachine manufacturing corporations, in association with the Japanese government
Ghost in the Shell: Stand Alone Complex
Ghost_in_the_Shell:_Stand_Alone_Complex
American microelectromechanical researcher
surface micromachining using polysilicon (poly) as a structural material, and silicon oxide as a sacrificial layer. This surface micromachining process
Richard_S._Muller
Computer memory type used for data preservation
and Fluorescence Intensity in a Silver-Sensitized Commercial Glass". Micromachines. 11 (12): 1026. doi:10.3390/mi11121026. PMC 7760589. PMID 33255189.
5D_optical_data_storage
Additive process used to make a 3D object
Liu, Guangdong (April 2022). "A Review of 3D Printed Bone Implants". Micromachines. 13 (4): 528. doi:10.3390/mi13040528. ISSN 2072-666X. PMC 9025296. PMID 35457833
3D_printing
Converter that measures a physical quantity and converts it into a signal
Metal-Oxide-Semiconductor Sensor and Micro-Packed Gas Chromatographic Column". Micromachines. 9 (8): 408. doi:10.3390/mi9080408. ISSN 2072-666X. PMC 6187308. PMID 30424341
Sensor
Chemical compound
1021/ja01675a502 K. Williams, K. Gupta, M. Wasilik. Etch Rates for Micromachining Processing – Part II J. Microelectromech. Syst., vol. 12, pp. 761–777
Carbon_tetrafluoride
Public university in Beijing, China
Wang; Haixia Li; Xiaoxia He (20 October 2016). "Decoupling Control of Micromachined Spinning-Rotor Gyroscope with Electrostatic Suspension". Sensors. 16
Tsinghua_University
Type of excimer laser
in the production of semiconductor integrated circuits, industrial micromachining, and scientific research. The term excimer is short for "excited dimer"
Krypton-fluoride_laser
Greek-American engineer and university administrator
L.P.B. "Development of self-packaged high frequency circuits using micromachining techniques." IEEE Transactions on Microwave Theory and Techniques, Vol
Linda_Katehi
Semiconductor company
Rai-Choudhury, Prosenjit (Ed.) (1997). Handbook of Microlithography, Micromachining, and Microfabrication. Volume 1: Microlithography. SPIE Press. p. 83
Carl_Zeiss_SMT
Line Stitch Strata Stray from the Path Stuck Mojo Stutterfly Sub Dub Micromachine Suburban Tribe Such a Surge Sugar Ray SugarComa Sugarless Suicide Silence
List_of_nu_metal_bands
Tunisian-American-French chemist (born 1961)
2020). "Quantum Dots: An Emerging Tool for Point-of-Care Testing". Micromachines. 11 (12): 1058. doi:10.3390/mi11121058. ISSN 2072-666X. PMC 7761335
Moungi_Bawendi
Connection between brain and computer
1016/0013-4694(94)90053-1. PMID 7514984. Alizadeh-Taheri B (1994). Active Micromachined Scalp Electrode Array for Eeg Signal Recording (PHD Thesis thesis).
Brain–computer_interface
Mirror whose surface can be deformed
actuators. MEMS concept mirrors are fabricated using bulk and surface micromachining technologies. They consist of a thin reflective membrane controlled
Deformable_mirror
Chemical element with atomic number 9 (F)
F. (2007). "Isotropic Etching of Silicon in Fluorine Gas for MEMS Micromachining". Journal of Micromechanics and Microengineering. 17 (2): 384–392. Bibcode:2007JMiMi
Fluorine
Electrophysiological method to record electrical activity of the brain
2019. Retrieved December 10, 2019. Alizadeh-Taheri B (1994). Active Micromachined Scalp Electrode Array for Eeg Signal Recording (PhD thesis). University
Electroencephalography
Database file format for data exchange of integrated circuit layout artwork
Release 6.0 // Calma, February 1987 SPIE Handbook of Microlithography, Micromachining and Microfabrication, Vol. 1: Microlithography // Bellingham, Wash. :
GDSII
American technology company
Lumera in 2012 for $52 million. Their lasers were primarily used in micromachining in industrial processes that use lasers to add very slight amounts of
Coherent,_Inc.
Hypothetical event
him (circa 1959) the idea of a medical use for Feynman's theoretical micromachines. Hibbs suggested that certain repair machines might one day be shrunk
Technological_singularity
Concept of eternal life
him (circa 1959) the idea of a medical use for Feynman's theoretical micromachines (see biological machine). Hibbs suggested that certain repair machines
Immortality
Italian nanoscientist
Sarro (born 1957) is an Italian nanoscientist whose research concerns micromachining and other techniques for fabricating silicon and silicon carbide based
Lina_Sarro
1964 novel by Stanisław Lem
machines that resemble bushes and swarms of minuscule, insect-like micromachines. Individually, or in small groups, the latter are quite harmless and
The_Invincible
Medical intervention
ultrasound technology, such as a piezoelectric transducer or capacitive micromachined ultrasonic transducer, to visualize the endothelium of blood vessels
Medical_ultrasound
Electrical Engineering/Microsystems Engineering, specifically surface-micromachined actuators in microoptical applications and silicon-on-insulator (SOI)
Ha_Duong_Ngo
2673-8244 Micro 2021 2673-8023 Microbiology Research 2010 2036-7481 Micromachines 2010 2072-666X Microorganisms 2013 2076-2607 Microplastics 2022 2673-8929
List of MDPI academic journals
List_of_MDPI_academic_journals
Oxidizing acid mixture containing sulfuric acid and hydrogen peroxide
PDMS-PDMS Interface Bonding with Piranha Solution and its Swelling Effect". Micromachines. 3 (2): 427–441. doi:10.3390/mi3020427. "Piranha Waste Fact Sheet, University
Piranha_solution
Ion with formula HF2 and charge 1-
ISBN 3527306730. Williams, K.R.; Muller, R.S. (Dec 1996). "Etch rates for micromachining processing". Journal of Microelectromechanical Systems. 5 (4): 256–269
Bifluoride
US-based biomedical engineer
Kurt; Fan, Zhonghui; Effenhauser, Carlo S.; Manz, Andreas (1993). "Micromachining a Miniaturized Capillary Electrophoresis-Based Chemical Analysis System
Z._Hugh_Fan
Resolution-improving photomask
ISBN 0-8194-5660-8. Rai-Choudhury, P., ed. (1997). Handbook of Microlithography, Micromachining, and Microfabrication. Volume 1: Microlithography. Bellingham, Washington:
Phase-shift_mask
combination with frequency doubling. Also used pulsed for marking and micromachining. A frequency doubled nd:YVO4 laser is also the normal way of making
List_of_laser_types
Series of 16-bit minicomputers
to the LSI-11. This option allowed programming of the internal 8-bit micromachine to create application-specific extensions to the PDP-11 instruction set
PDP-11
Electrical and Electronics Engineers (IEEE) in 2014 "for contributions to micromachined gyroscopes". He served as the President of the IEEE Sensors Council
Andrei_Shkel
Medical condition
2021). "Techniques for the Detection of Sickle Cell Disease: A Review". Micromachines. 12 (5): 519. doi:10.3390/mi12050519. PMC 8148117. PMID 34063111. Mendez-Marti
Sickle_cell_disease
Process for shaping conductive metals
turbine blades Multiple hole drilling Machining steam turbine blades Micromachining Profiling and contouring Rifling No contact occurs between tool and
Electrochemical_machining
American electrical engineer
advisor, Richard S. Muller at Berkeley, developed polysilicon surface micromachining technology. This process opened the possibilities of micro mechanical
Roger_T._Howe
Compound that participates in a chemical reaction that produces another compound
based on infrared spectroscopy in a hollow fiber matched to a silicon-micromachined fast gas chromatography column can analyze illegal stimulants and precursors
Precursor_(chemistry)
Form of gas laser
Klank, Henning; Kutter, Jörg P.; Geschke, Oliver (2002). "CO2-laser micromachining and back-end processing for rapid production of PMMA-based microfluidic
Carbon-dioxide_laser
ultimately reveals to the Major that he had discovered that several micromachine manufacturing corporations, in association with the Japanese government
List of Ghost in the Shell characters
List_of_Ghost_in_the_Shell_characters
Device that transmits and receives radio waves
Omnidirectional Antenna Featuring Small Azimuthal Gain Variation". Micromachines. 14 (12): 2218. doi:10.3390/mi14122218. ISSN 2072-666X. PMC 10745689
Antenna_(radio)
2006 film directed by Kenji Kamiyama
dead. In retaliation, a Siak operative plans a terrorist attack with a micromachine virus. Batou is sent to intercept the Siak operative and unexpectedly
Ghost in the Shell: Stand Alone Complex – Solid State Society
Ghost_in_the_Shell:_Stand_Alone_Complex_–_Solid_State_Society
Small factory in capital or size
00837000001&idtype=cvips&gifs=yes Ernst Kussul et al. Development of micromachine tool prototypes for microfactories, Journal of Micromechanics and Microengineering
Microfactory
The three-axis acceleration switch is a micromachined microelectromechanical systems (MEMS) sensor that detects whether an acceleration event has exceeded
Three-Axis Acceleration Switch
Three-Axis_Acceleration_Switch
American technology company
and inspection, semiconductor wafer processing and component parts micromachining; Revenue US$159.1 million (FY 2015) Parent MKS Instruments Website esi
Electro_Scientific_Industries
Multidirectional etching in semiconductor manufacturing
Wayne; Motamedi, M. Edward; Luo, Fang-Chen (eds.). "Gas-phase silicon micromachining with xenon difluoride". Microelectronic Structures and Microelectromechanical
Isotropic_etching
Interdisciplinary branch of biology and engineering
in Artificial Organ Development: What Is the Future of Medicine?". Micromachines. 11 (7): 646. Bibcode:2020Micma..11..646K. doi:10.3390/mi11070646. ISSN 2072-666X
Synthetic_biology
Molecular-scale artificial or biological device
; Lim, N.; Kang, D. Y.; Zimmerman, M.; Zhang, L.; Wang, J. (2011). "Micromachine-Enabled Capture and Isolation of Cancer Cells in Complex Media". Angewandte
Molecular_machine
Thermoanalytical technique
of Fast-scan DSC (FSC), a novel calorimetric technique that employs micromachined sensors. The key advances of this technique are the ultrahigh scanning
Differential scanning calorimetry
Differential_scanning_calorimetry
Appointments made by King Charles III
Black British Music. Dr. Nadeem Hasan Rizvi, Managing Director, Laser Micromachining. For services to Industrial Laser Applications in Manufacturing. Joanne
2026_Birthday_Honours
Imaging technique
Chahwan A, Gordon ML, Qi B, Vitkin IA, Wilson BC, Goldenberg AA (2005). "Micromachined 2-D scanner for 3-D optical coherence tomography". Sensors and Actuators
Optical_coherence_tomography
Device to detect the presence or absence of gases
Metal-Oxide-Semiconductor Sensor and Micro-Packed Gas Chromatographic Column". Micromachines. 9 (8): 408. doi:10.3390/mi9080408. ISSN 2072-666X. PMC 6187308. PMID 30424341
Gas_detector
Chemical compound
Dies and Electrical Components from Rigid to Flexible Substrates". Micromachines. 14 (2): 415. doi:10.3390/mi14020415. ISSN 2072-666X. PMC 9960505. PMID 36838115
Parylene
disappeared ship on the planet Regis III, discovering swarms of insect-like micromachines. Translated from German by Wendayne Ackerman (New York: The Seabury
List of works by Stanisław Lem and their adaptations
List_of_works_by_Stanisław_Lem_and_their_adaptations
Controlled material removal, without the use of liquid substances
vertical sides are desired. Along with semiconductor manufacturing, micromachining and display production, the removal of organic residues by oxygen plasmas
Dry_etching
Genus of single-celled organisms
(2016-12-26). "Vorticella: A Protozoan for Bio-Inspired Engineering". Micromachines. 8 (1): 4. doi:10.3390/mi8010004. PMC 6189993. Noland, Lowell E.; Finley
Vorticella
Combustion engine using an eccentric rotary design
"MEMS Rotary Engine Power System". IEEJ Transactions on Sensors and Micromachines. 123 (9). Berkeley, California: University of California: 326. Bibcode:2003IJTSM
Wankel_engine
Production with Ultrafast Lasers, Robert Bosch GmbH, "High-Precision Micromachining in Mass Production" Second Prize: Richard L. Sandstrom, William Partlo
Berthold Leibinger Innovationspreis
Berthold_Leibinger_Innovationspreis
2010-06-20.{{cite web}}: CS1 maint: archived copy as title (link) "Micromachining of Photostructurable Glass-Ceramics". Retrieved 29 October 2015. v t
Picotiter_plate
Fabrication at micrometre scales and smaller
wafers even though glass, plastics and many other substrate are in use. Micromachining, semiconductor processing, microelectronic fabrication, semiconductor
Microfabrication
Technology company
profilometers find applications in the semiconductor and electronics industry, micromachining, aerospace industry, casting, optical industry, plastics and glass industry
Novacam_Technologies
Type of resistor whose resistance varies with temperature
Joydeep; Mandal, Pradip; Guha, Prasanta Kumar (2017). "A review of micromachined thermal accelerometers". Journal of Micromechanics and Microengineering
Thermistor
Type of medical device
Han Y, Lu J (2021). "Structural Design of Vascular Stents: A Review". Micromachines. 12 (7): 770. doi:10.3390/mi12070770. PMC 8305143. PMID 34210099. Johnston
Stent
Interdisciplinary science
chip incorporating a sample injector and separation channels using micromachining techniques. This setup allowed for the rapid separation of amino acids
Microfluidics
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