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Quickly heats semiconductor wafers to high temperatures
Rapid thermal processing (RTP) is a semiconductor manufacturing process which heats silicon wafers to temperatures exceeding 1,000°C for not more than
Rapid_thermal_processing
Semiconductor company
semiconductor equipment globally. Its main products are dry strip system, rapid thermal processing, as well as etching. The company provides products for customers
Mattson_Technology
Process used to alter the electrical properties of semiconductors
are being supplanted by Rapid Thermal Anneal (RTA) or Rapid Thermal Processing (RTP). This is due to the relatively long thermal cycles of furnaces that
Furnace_anneal
during rapid thermal processing". Applied Physics Letters. 70 (13). scitation.aip.org: 1700–1702. doi:10.1063/1.118674. Rapid Thermal Processing for Future
Ultraviolet thermal processing
Ultraviolet_thermal_processing
American semiconductor equipment manufacturer
In 2004, Ultratech formally entered the rapid thermal processing market when it shipped its Laser Processing (LP) system. Since March 2017 Ultratech has
Ultratech
Topics referred to by the same term
games to refer to the percentage of winning for the customer. Rapid thermal processing, in semiconductor production Round-the-pole flying, of model aircraft
RTP
application of thermal energy following the ion implantation of dopants. In the most common industrial example, rapid thermal processing is applied to
Dopant_activation
American semiconductor equipment company
chemical vapor deposition (CVD), physical vapor deposition (PVD), rapid thermal processing (RTP), chemical mechanical polishing (CMP), etch, ion implantation
Applied_Materials
Chemical compound
Lanford, W. (1992). "Kinetics of platinum silicide formation during rapid thermal processing". Journal of Applied Physics. 72 (5): 1833–1836. Bibcode:1992JAP
Platinum_silicide
uses a conveyor or belt to carry process parts or material through a primary heating chamber for rapid thermal processing. It is designed for fast drying
Conveyor_belt_furnace
Type of MOSFET
10. It achieves these things through a manufacturing process known as rapid thermal processing (RTP) that uses ultrafine layers of construction materials
QFET
Thin slice of semiconductor used for the fabrication of integrated circuits
wafer Epitaxy Monocrystalline silicon Polycrystalline silicon Rapid thermal processing RCA clean SEMI font Silicon on insulator (SOI) wafers Solar cell
Wafer_(electronics)
Coating process for applying heated materials to a surface
Thermal spraying techniques are coating processes in which melted (or heated) materials are sprayed onto a surface. The "feedstock" (coating precursor)
Thermal_spraying
Manufacturing process used to create integrated circuits
photolithography) Thermal treatments Rapid thermal processing (RTP), rapid thermal anneal Millisecond thermal processing, millisecond anneal, millisecond processing, flash
Semiconductor device fabrication
Semiconductor_device_fabrication
Loss of control of an exothermal process due to temperature increases
Thermal runaway describes a process that is accelerated by increased temperature, in turn releasing energy that further increases temperature. Thermal
Thermal_runaway
Non-crystalline silicon
Nanoparticle Physical vapor deposition (PVD) Protocrystalline Rapid thermal processing (RTP) Collins, R.W.; Ferlauto, A.S.; Ferreira, G.M.; Chen, Chi;
Amorphous_silicon
Use of ions to cause chemical changes
dopants and can be carried out using a tube or batch furnace, Rapid Thermal Processing, flash lamp anneal, laser anneal or other annealing techniques
Ion_implantation
Type of engineered wood
Thermally modified wood is any thermally-treated timber that has been modified by a controlled process of pyrolysis, in which it is heated to temperatures
Thermally_modified_wood
Gas discharge lamp that produces intense white light
optical filters), solar simulation for age testing of materials, rapid thermal processing, material inspection and sintering. Though not commonly known outside
Xenon_arc_lamp
Technology using sunlight for heat
Solar thermal energy (STE) is a form of energy and a technology for harnessing solar energy to generate thermal energy for use in industry, and in the
Solar_thermal_energy
Load caused by rapid temperature change
Thermal shock is a type of thermal stress caused by a sudden change in temperature. It is a common mode of failure when a hot meets cold, such as pouring
Thermal_shock
Measurement of oven temperatures
A thermal profile is a complex set of time-temperature data typically associated with the measurement of thermal temperatures in an oven (ex: reflow oven)
Thermal_profiling
Process by which heat is transferred within an object
Thermal conduction is the diffusion of thermal energy (heat) within one material or between materials in contact. The higher temperature object has molecules
Thermal_conduction
Thermal tool that cuts dense heavy materials
will burn faster. Burning steel wool is simply the rapid oxidation of iron into Fe 2O 3; the thermal lance uses steel in the form of rods rather than wool
Thermal_lance
Rate at which heat spreads throughout a material
high thermal diffusivity, heat moves rapidly through it because the substance conducts heat quickly relative to its energy storage capacity or "thermal bulk"
Thermal_diffusivity
Technology in semiconductor manufacturing
ISBN 978-0-471-57481-1. US 4771016, Bajor, George & et al., "Using a rapid thermal process for manufacturing a wafer bonded soi semiconductor", issued 1988-09-13
Silicon_on_insulator
Chemical decomposition caused by heat
Thermal decomposition, or thermolysis, is a chemical decomposition of a substance caused by heat. The decomposition temperature of a substance is the
Thermal_decomposition
Technologies to store thermal energy
Thermal energy storage (TES) is the storage of thermal energy for later reuse. Employing widely different technologies, it allows thermal energy to be
Thermal_energy_storage
Water vapor used in industrial processes
gases in sputtering, spin-on and ALD processes. In the semiconductor and MEMS industries, Rapid Thermal Processing (RTP) and Diffusion need high flow rates
Ultra-high-purity steam for oxidation and annealing
Ultra-high-purity_steam_for_oxidation_and_annealing
Capacity of a material to conduct heat
The thermal conductivity of a material is a measure of its ability to conduct heat. It is commonly denoted by k {\displaystyle k} , λ {\displaystyle \lambda
Thermal conductivity and resistivity
Thermal_conductivity_and_resistivity
Fluid used to maximize thermal contact
Thermal paste (also called thermal compound, thermal grease, thermal interface material (TIM), thermal gel, heat paste, heat sink compound, heat sink paste
Thermal_paste
Global warming about 55 million years ago
Paleocene–Eocene thermal maximum (PETM), alternatively "Eocene thermal maximum 1 (ETM1)" and formerly known as the "Initial Eocene" or "Late Paleocene thermal maximum"
Paleocene–Eocene thermal maximum
Paleocene–Eocene_thermal_maximum
Thermal engineering discipline concerning transfer of heat in physical systems
Heat transfer is a discipline of thermal engineering that concerns the generation, use, conversion, and exchange of thermal energy (heat) between physical
Heat_transfer
Device or computer program used for writing and editing documents
world of the personal computer. The concept of word processing arose from the more general data processing, which since the 1950s had been the application
Word_processor
Sterile food processing technique
Aseptic processing is a processing technique wherein commercially thermally sterilized liquid products (typically food or pharmaceutical) are packaged
Aseptic_processing
Thermal hydrolysis is a process used for treating industrial waste, municipal solid waste and sewage sludge by applying heat and rapid lowering of pressure
Thermal_hydrolysis
Form of exhaust heat management
Thermal barrier coatings (TBCs) are advanced materials systems usually applied to metallic surfaces on parts operating at elevated temperatures, such
Thermal_barrier_coating
Additive process used to make a 3D object
F. B. (1998). "Shape Deposition Manufacturing With Microcasting: Processing, Thermal and Mechanical Issues". Journal of Manufacturing Science and Engineering
3D_printing
Laboratory equipment for cycling temperature
Thermal cyclers may also be used in laboratories to facilitate other temperature-sensitive reactions, including restriction enzyme digestion or rapid
Thermal_cycler
Molecular compound with applications in ceramics
(HSiO3/2)n9, by rapid thermal processing". In Moslehi, Mehrdad M.; Singh, Rajendra; Kwong, Dim-Lee (eds.). Rapid Thermal and Integrated Processing. SPIE Proceedings
Silsesquioxane
Gas desulfurizing process
process remains the most important desulfurization process in the petrochemicals industry. It is standard at oil refineries, natural gas processing plants
Claus_process
Power plant that generates electricity from heat energy
A thermal power station, also known as a thermal power plant, is a type of power station in which the heat energy generated from various fuel sources (e
Thermal_power_station
Water temperature changes resulting in degraded water quality
Thermal pollution, sometimes called "thermal enrichment", is the degradation of water quality by any process that changes ambient water temperature. Thermal
Thermal_pollution
Electromagnetic radiation generated by the thermal motion of particles
Thermal radiation is electromagnetic radiation emitted by the thermal motion of particles in matter. All matter with a temperature greater than absolute
Thermal_radiation
Coating deposition method
gas, is converted to plastic deformation energy during bonding. Unlike thermal spraying techniques, e.g., plasma spraying, arc spraying, flame spraying
Cold_spraying
Thermal method of analysis
Thermogravimetric analysis or thermal gravimetric analysis (TGA) is a method of thermal analysis in which the mass of a sample is measured over time as
Thermogravimetric_analysis
Passage of a system from an initial to a final state of thermodynamic equilibrium
remains constant. An adiabatic process is a process in which there is no matter or heat transfer, because a thermally insulating wall separates the system
Thermodynamic_process
Satisfaction with the thermal environment
Thermal comfort is the condition of mind that expresses subjective satisfaction with the thermal environment. The human body can be viewed as a heat engine
Thermal_comfort
Electrical safety device
A thermal cutoff is an electrical safety device (either a thermal fuse or thermal switch) that interrupts electric current when heated to a specific temperature
Thermal_cutoff
Regulation of the temperature of electronic circuitry to prevent inefficiency or failure
transferring thermal energy ("heat") from an object at high temperature to a second object at a lower temperature with a much greater heat capacity. This rapid transfer
Thermal management (electronics)
Thermal_management_(electronics)
Transparent non-crystalline solid material
imperviousness to thermal shock. Thus, glass-ceramics have become extremely useful for countertop cooking and industrial processes. The negative thermal expansion
Glass
Thermal imaging camera in firefighting
components: an optic system, detector, amplifier, signal processing, and display. Fire-service specific thermal imaging cameras incorporate these components in
Thermal_imaging_camera
Method of printing using heat
complex is thermal transfer printing that melts print off a ribbon and onto the sheet of paper. Thermography is also the name of a post print process that is
Thermographic_printing
Type of thermographic camera
well as those of other thermal imaging cameras, use detection of infrared radiation, typically emitted from a heat source (thermal radiation), to create
Forward-looking_infrared
Thermal electromagnetic radiation
Black-body radiation is the thermal electromagnetic radiation emitted from a body in thermodynamic equilibrium with its environment. A black body is an
Black-body_radiation
Methods of transforming crude oil
as thermal cracking units such as visbreakers (viscosity breakers, units to lower the viscosity of the oil). All of the many other refining processes discussed
Petroleum_refining_processes
Phenomenon inducing change in convection current within fluid
substrate with thin thermal interface material (TIM). The temperature sensors were fabricated using standard silicon processing technologies which were
Thermal_inductance
Kinetic energy of an unbound neutron
has a higher reaction rate with thermal neutrons. Fast neutrons can be rapidly changed into thermal neutrons via a process called moderation. This is done
Neutron_temperature
Nuclear spacecraft propulsion technology
A nuclear thermal rocket (NTR) is a type of thermal rocket where the heat from a nuclear reaction replaces the chemical energy of the propellants in a
Nuclear_thermal_rocket
Method used to apply surface coatings
This CVD process is based on metalorganic precursors. Rapid thermal CVD (RTCVD) – This CVD process uses heating lamps or other methods to rapidly heat the
Chemical_vapor_deposition
Form of electromagnetic radiation
continuous: it radiates at all wavelengths. Of these natural thermal radiation processes, only lightning and natural fires are hot enough to produce much
Infrared
Thermoanalytical technique
a rapid and reliable method of thermal analysis.[citation needed] DSC is used widely for examining polymeric materials to determine their thermal transitions
Differential scanning calorimetry
Differential_scanning_calorimetry
Use of mirrors or lenses to heat a fluid for electricity generation
power (CSP), also called concentrating solar power or concentrated solar thermal, involves systems that collect solar heat for multiple purposes like cooking
Concentrated_solar_power
Temperature difference per unit of length
by temperature changes during a wildfire, through thermal stress weathering, may result in thermal shock and subsequent structure failure. Atmospheric
Temperature_gradient
Heat from a current in an electric conductor
aseptic processing. Electrical energy is linearly translated to thermal energy as electrical conductivity increases, and this is the key process parameter
Joule_heating
Device that collects heat
A solar thermal collector collects heat by absorbing sunlight. The term "solar collector" commonly refers to a device for solar hot water heating, but
Solar_thermal_collector
Variation on the Rankine thermodynamic cycle
In thermal engineering, the Organic Rankine cycle (ORC) is a type of thermodynamic cycle. It is a variation of the Rankine cycle named for its use of
Organic_Rankine_cycle
Type of safety glass processed to increase its strength
Tempered or toughened glass is a type of safety glass processed by controlled thermal or chemical treatments to increase its strength compared with normal
Tempered_glass
Alloy that is liquid at room temperature
higher clock speeds and CPU processing power achieved in demonstrations and competitive overclocking. Two examples are Thermal Grizzly Conductonaut and Coolaboratory
Galinstan
Form of energy conversion
Syngas can also be used for further processing to liquid fuels or chemicals. Gasifiers offer a flexible option for thermal applications, as they can be retrofitted
Gasification
Piece of material left on a workpiece after some operation
of the work piece is unaffected. Thermal energy method (TEM), also known as thermal deburring, is a deburring process used to remove hard-to-reach burrs
Burr_(edge)
AI accelerator ASIC by Google
Tensor Processing Unit (TPU) is a neural processing unit (NPU) application-specific integrated circuit (ASIC) developed by Google for neural network machine
Tensor_Processing_Unit
Thermodynamic process in which no mass or heat is exchanged with surroundings
expansion because latent heat is released by precipitation. A process without transfer of thermal energy (heat) to or from a system, so that Q = 0, is called
Adiabatic_process
Phenomenon in astroparticle physics
"partially because the Urca Process results in a rapid disappearance of thermal energy from the interior of a star, similar to the rapid disappearance of money
Urca_process
Manufacturing processes
Thermal spraying Powder metallurgy Compaction plus sintering Hot isostatic pressing Metal injection moulding Spray forming Plastics (see also Rapid prototyping)
List of manufacturing processes
List_of_manufacturing_processes
Alteration in the polymer properties under the influence of environmental factors
result. Although oxygen levels inside processing equipment are usually low, it cannot be fully excluded and thermal-oxidation will usually take place more
Polymer_degradation
Alloy with higher durability than normal metals
point. Key characteristics of a superalloy include mechanical strength, thermal creep deformation resistance, surface stability, and corrosion and oxidation
Superalloy
Digital printing technology with wide color range
name dye diffusion thermal transfer (D2T2). The term was later also applied to the indirect sublimation transfer printing process, which uses a standard
Dye-sublimation_printing
Oxygen-free break down of material
produce biogas. For example, certain processes shred the substrates to increase the surface area or use a thermal pretreatment stage (such as pasteurisation)
Anaerobic_digestion
System that transfers heat from one space to another
A heat pump is a device that uses mechanical or thermal energy to transfer heat from one space to another. The mechanical heat pump uses electric power
Heat_pump
Phase of sleep characterized by random and rapid eye movements
REM sleep is for procedural memory processing, and the rapid eye movement is only a side effect of the brain processing the eye-related procedural memory
Rapid_eye_movement_sleep
Sustained nuclear fission achieved solely by prompt neutron emission
delayed neutrons). As a result, prompt supercriticality causes a much more rapid growth in the rate of energy release than other forms of criticality. Nuclear
Prompt_criticality
Process in physical chemistry
Negative thermal expansion (NTE) is an unusual physicochemical process in which some materials contract upon heating, rather than expand as most other
Negative_thermal_expansion
Flat bottomed pan for cooking food on a stove
scratch-resistant cooking surface. Diamond's high thermal conductivity (900–2320 W/m·K) may offer rapid and even heat distribution, making them useful for
Frying_pan
Biological material from living or recently living organisms
over large scales. In biological wastewater treatment processes, such as the activated sludge process, the term "biomass" is used to denote the mass of bacteria
Biomass
Management of thermal energy in subsurface aquifers
Aquifer thermal energy storage (ATES) is the storage and recovery of thermal energy in subsurface aquifers. ATES can heat and cool buildings. Storage and
Aquifer thermal energy storage
Aquifer_thermal_energy_storage
with fewer steps, less processing time, and faster results. It is used in molecular biology, forensics, and medicine for the rapid identification and diagnosis
Transcription-mediated amplification
Transcription-mediated_amplification
Science and technology of creating objects from inorganic, non-metallic materials
obtained ceramic. In the sintered body, grain sizes are a product of the thermal processing parameters as well as the initial particle size, or possibly the sizes
Ceramic_engineering
Process to convert organic matter into gas
Plasma gasification is a thermal process that converts organic matter into a syngas (synthesis gas) which is primarily made up of hydrogen and carbon
Plasma_gasification
Solar energy technology
Photovoltaic thermal collectors, typically abbreviated as PVT collectors and also known as hybrid solar collectors, photovoltaic thermal solar collectors
Photovoltaic thermal hybrid solar collector
Photovoltaic_thermal_hybrid_solar_collector
In materials science
approaches based on the bulk (particulate processing), preform processing, layer processing and melt processing are used to fabricate the functionally graded
Functionally_graded_material
Characteristic time in a system
many areas of physics and engineering, including electrical circuits, thermal systems, excitable membranes in biophysics, radioactive decay, and the
Time_constant
Phenolic lipid
component of cashew nutshell liquid (CNSL), a byproduct of cashew nut processing. Cardanol finds use in the chemical industry in resins, coatings, frictional
Cardanol
Grouping of evolved cool luminous stars
dredge-up but dredge-ups following thermal pulses will still be called a third dredge-up. Thermal pulses increase rapidly in strength after the first few
Asymptotic_giant_branch
Method of preserving and sterilizing food under high pressure
pressure processing (HPP) or high hydrostatic pressure (HHP) processing is a method of preserving and sterilizing food, in which a product is processed under
Pascalization
Ceramic engineering process
However, the processing time is typically very long and the deposition rate is slow, so new routes have been invented to develop more rapid infiltration
Chemical_vapor_infiltration
Spring produced by the emergence of geothermally heated groundwater
through the crust by a slow process of thermal conduction, but in volcanic areas, the heat is carried to the surface more rapidly by bodies of magma. A hot
Hot_spring
Devices using beams of free electrons
cross-link polymers to make them more resistant to thermal, mechanical or chemical stresses. E-beam processing has been used for the sterilization of medical
Electron-beam_technology
Conditions in which the temperature of a diver can remain stable
Thermal balance of a diver occurs when the total heat exchanged between the diver and their surroundings results in a stable temperature of the diver
Thermal balance of the underwater diver
Thermal_balance_of_the_underwater_diver
Expansion card which generates a feed of output images to a display device
distinction to an integrated graphics processor on the motherboard or the central processing unit (CPU). A graphics processing unit (GPU) that performs the necessary
Graphics_card
RAPID THERMAL-PROCESSING
RAPID THERMAL-PROCESSING
Surname or Lastname
English
English : occupational name for a sheepshearer or someone who used shears to trim the surface of finished cloth and remove excess nap, from Middle English shereman ‘shearer’.Americanized spelling of German Schuermann.Jewish (Ashkenazic) : occupational name for a tailor, from Yiddish sher ‘scissors’ + man ‘man’.Roger Sherman (1722–93), the only man to sign all three documents at the foundation of the American republic (the Declaration of Independence, the Articles of Confederation, and the U.S. Constitution), was born in Newton, MA, a descendant of Capt. John Sherman, who had emigrated in about 1636 to MA from Dedham, Essex, England, where his father was a farmer, following his brother Edmund, who had emigrated two years earlier. A descendant of Edmund Sherman was the U.S. general William Tecumseh Sherman (1820–91), who led the Union march through GA. He was born in Lancaster, OH, the son of a judge; his middle name was bestowed in honor of a Shawnee chieftain.
Boy/Male
Hindu, Indian
Fast; Rapid; Swift
Boy/Male
Arabic, Muslim
Leader; Pioneer
Female
Greek
(ΘήÏα) Greek name THERA means "lustrous." In mythology, this is the name of one of Amphion's seven daughters. Compare with another form of Thera.
Girl/Female
Tamil
Quick, Rapid
Female
English
English name derived from the Greek word thelema, THELMA means "will." In use by the English.
Girl/Female
Hindu
Rapid
Girl/Female
Tamil
Rapid
Boy/Male
Hebrew
Wanderer.
Male
English
 English name derived from Latin Hermanus, HERMAN means "army man." Compare with another form of Herman.
Boy/Male
Hindu, Indian, Marathi
Swift; Rapid
Boy/Male
Arabic, Muslim
Showing Right Way; Beautiful
Boy/Male
Indian
Support
Girl/Female
Hindu, Indian, Marathi, Sanskrit
Rapid; A River
Boy/Male
Muslim
Support
Boy/Male
Indian
Lion, Rapid
Male
Hebrew
(רָבִיד) Hebrew name RAVID means "jewelry, ornament."
Boy/Male
Muslim
Lion, Rapid
Girl/Female
Indian
Quick, Rapid
Female
Spanish
 Pet form of Spanish Theresa, THERA means "harvester." Compare with another form of Thera.
RAPID THERMAL-PROCESSING
RAPID THERMAL-PROCESSING
Boy/Male
British, English
Form of Reed
Boy/Male
Australian, Latin
Valiant
Girl/Female
Hindu, Indian
Bestower of Wealth
Girl/Female
French, German
Spear Ruler
Female
Bulgarian
, Jehovah's gift (or grace).
Boy/Male
Arabic, Muslim
Intercessor
Male
Serbian
(Ðенад) Serbian name, possibly NENAD means "unexpected."
Boy/Male
Arabic, Muslim
Spear of the Religion Islam
Girl/Female
Christian & English(British/American/Australian)
Pure
Surname or Lastname
English
English : patronymic from the Middle English personal name Leving, Old English Lēofing, based on lēof ‘dear’. Compare Loving.Latvian (Leviņš) : Latvianized form of Jewish Levin.
RAPID THERMAL-PROCESSING
RAPID THERMAL-PROCESSING
RAPID THERMAL-PROCESSING
RAPID THERMAL-PROCESSING
RAPID THERMAL-PROCESSING
a.
Pertaining to the integument or skin of animals; dermic; as, the dermal secretions.
a.
Having lost its life and spirit; dead; spiritless; insipid; flat; dull; unanimated; as, vapid beer; a vapid speech; a vapid state of the blood.
n.
Affected with the distemper called rabies; mad; as, a rabid dog or fox.
a.
Pertaining to, derived from, or resembling, ether; as, ethereal salts.
n.
Of or pertaining to rabies, or hydrophobia; as, rabid virus.
a.
Very swift or quick; moving with celerity; fast; as, a rapid stream; a rapid flight; a rapid motion.
n.
An attack or invasion for the purpose of making arrests, seizing property, or plundering; as, a raid of the police upon a gambling house; a raid of contractors on the public treasury.
a.
Theriac.
v. t.
To make a raid upon or into; as, two regiments raided the border counties.
a.
Pertaining to the hypothetical upper, purer air, or to the higher regions beyond the earth or beyond the atmosphere; celestial; as, ethereal space; ethereal regions.
a.
Of or pertaining to heat; due to heat; thermal; as, thermic lines.
a.
The part of a river where the current moves with great swiftness, but without actual waterfall or cascade; -- usually in the plural; as, the Lachine rapids in the St. Lawrence.
a.
Quick in execution; as, a rapid penman.
a.
Advancing with haste or speed; speedy in progression; in quick sequence; as, rapid growth; rapid improvement; rapid recurrence; rapid succession.
pl.
of Herma
n.
A hostile or predatory incursion; an inroad or incursion of mounted men; a sudden and rapid invasion by a cavalry force; a foray.
a.
Of or pertaining to a theca; as, a thecal abscess.
n.
Extreme, unreasonable, or fanatical in opinion; excessively zealous; as, a rabid socialist.
adv.
In a thermal manner.
a.
Of or pertaining to heat; warm; hot; as, the thermal unit; thermal waters.